655 |
LAM, 715-032012-003, PL, WDO, CHMBR, CAPTIVE, HDW
|
04-15 |
3843 |
654 |
LAM, 715-031986-008, HSG, LWR REAC CHMBR
|
04-22 |
3965 |
653 |
LAM, 715-032012-006, PL, WDO, CHMBR, CAPTIVE, HDW
|
04-22 |
4155 |
652 |
AMAT, 0020-35818, PLATE COOLDOWN PEDESTAL
|
04-26 |
3894 |
651 |
AMAT, 0200-50107, MODIFY SINGLE RING DPS NOTCH
|
05-01 |
3803 |
650 |
LAM, 713-037072-007, HANGER
|
05-15 |
3889 |
649 |
LAM, 715-330180-001, ELCTD, BOT, FXD GAP ESC, LOW TEMP
|
05-16 |
3704 |
648 |
AMAT, 0021-00571, Insert Chamber Exhaust EPI 200mm SST
|
05-17 |
3570 |
647 |
TEL, 1880-026696-12, TEL Si electrode
|
05-21 |
3707 |
646 |
AMAT, 0040-34815, CLEANED INJECT CAP
|
05-21 |
3569 |
645 |
AMAT, 0040-35365, CAP, INJECT MACHINED, 3 ZONE
|
05-21 |
3704 |
644 |
LAM, 715-012233-007, GATE, INNER, W O-RING
|
05-29 |
3688 |
643 |
LAM, 715-030319-001, COV, SCR, BOT R, BSR
|
05-29 |
3931 |
642 |
AMAT, 0040-84465, CAP INJECT MACHINED, 3 ZONE
|
06-12 |
3825 |
641 |
AMAT, 0041-37448, CLAMP RING, UPPER ATM
|
06-14 |
4054 |