|
825 |
AMAT, 0021-27883, COVER SLIT
|
04-03 |
85 |
|
824 |
LAM, 839-044692-002, Liner housing
|
04-03 |
65 |
|
823 |
LAM, 715-104664-001, Baffle
|
04-03 |
70 |
|
822 |
LAM, 715-088776-004, Lower Electrode Plate
|
04-03 |
59 |
|
821 |
LAM, 715-066095-203, Upper electrode return
|
04-03 |
44 |
|
820 |
LAM, 715-066095-202, Lower electrode return
|
04-03 |
40 |
|
819 |
LAM, 715-044691-004, Liner spacer
|
04-03 |
44 |
|
818 |
LAM, 715-044691-002, Lower liner
|
04-03 |
63 |
|
817 |
LAM, 715-042721-866, Chamber Liner
|
04-03 |
46 |
|
816 |
LAM, 715-042721-009, Chamber Liner
|
04-03 |
58 |
|
815 |
LAM, 715-027638-814, CHMBR, TOP PC, 2300 MTL/PLY
|
04-03 |
40 |
|
814 |
LAM, 715-027638--014, Top Chamber
|
04-03 |
52 |
|
813 |
LAM, 714-045744-008, LINER, CANTILEVER, OUTER LNR MNT, 2300
|
04-03 |
68 |
|
812 |
LAM, 714-045743-809, LINER, FIXED OUTER, ACME, 2300
|
04-03 |
51 |
|
811 |
LAM, 714-044593-002, Liner cantilever
|
04-03 |
56 |
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