10 |
AMAT, 0010-53901, 300mm Producer Ceramic Heater
|
03-11 |
126 |
9 |
LAM, 839-019080-611, ESC, 300MM, TUNABLE COUL RF
|
03-20 |
126 |
8 |
AMAT, 0200-36696, SHADOW RING
|
02-28 |
125 |
7 |
AMAT, 0200-00811, Injector Gas Blankoff
|
02-28 |
120 |
6 |
AMAT, 0040-33701, HEATER BLOCK INSERT ASSEMBLY ULTIMA 1.5.
|
03-21 |
111 |
5 |
AMAT, 0010-03840, HEATER ASSY, ALN, CIP, PRODUCER 200MM
|
03-11 |
104 |
4 |
LAM, 839-019090-620, 620 ESC, TUNABLE HB-DFB KIYO FX
|
03-20 |
102 |
3 |
AMAT, 0040-81155, LINER LOWER 300MM DPS2
|
04-05 |
101 |
2 |
AMAT, 0200-04877, Single Ring, Ceramic
|
04-04 |
95 |
1 |
AMAT, 0200-16530, ENDPOINT WINDOW, SYM3
|
04-25 |
41 |