|
46 |
MATTSON, 303-01355-00, PLATEN WATER COOLED
|
10-10 |
6303 |
|
45 |
LAM, 839-800327-315, ESC 300mm, CER, BI, IMB BIG PIN
|
09-19 |
6416 |
|
44 |
AMAT, 0040-35161, DUCT 6 INCH DEPOSITION CHAMBER
|
09-11 |
6247 |
|
43 |
AMAT, E11120441, MANIPULATOR, ASSY, VIISTA810EHP, AMAT
|
09-04 |
6441 |
|
42 |
AMAT, E11051221, ROPLAT, ECLAMP DRIVE, E500
|
09-04 |
6435 |
|
41 |
AMAT, 0040-88340, UPPER CHAMBER LINER THICK, 300MM, DPS2
|
08-02 |
6575 |
|
40 |
AMAT, 0020-03658, CLAMPING CYLINDER
|
07-25 |
6335 |
|
39 |
AMAT, 0040-35095, CHILL PLATE UPPER REFLECTOR
|
07-18 |
6411 |
|
38 |
AMAT, 0040-35452, CHILL PLATE RH, LOWER REFLECTOR
|
07-18 |
6264 |
|
37 |
AMAT, 0040-35451, CHILL PLATE LH, LOWER REFLECTOR
|
07-18 |
6446 |
|
36 |
AMAT, 0040-38488, AIR SHROUD, UPPER
|
04-25 |
6671 |
|
35 |
EDWARDS, STP-XA2703BV80, EDWARDS TMP
|
04-11 |
6589 |
|
34 |
LAM, 716-082886-006, GAS INJECTOR
|
04-06 |
6781 |
|
33 |
MATTSON, 304-05257-00, LID, COVER A3 CVD
|
03-28 |
6633 |
|
32 |
AMAT, 0040-02751, AIR SHROUD LOWER
|
02-14 |
6581 |