|
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
 |
12-18 |
5992 |
|
60 |
AMAT, 0020-36026, BRACKET LOCATING ROTATION ARM
|
12-18 |
6126 |
|
59 |
AMAT, 0020-36022, SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT
|
12-18 |
6100 |
|
58 |
AMAT, 0020-36019, BRACKET WAFER LIFT MAG COUPLED ROTATION
|
12-18 |
6172 |
|
57 |
AMAT, 0020-36018, BRACKET SUPPORT TO UPPER CYLINDER
|
12-18 |
6301 |
|
56 |
AMAT, 0020-36017, SUPPORT ROTATION HOUSING AND BEARING
|
12-18 |
6370 |
|
55 |
AMAT, 0020-36015, AIR DAM LOWER LAMP ASSY
|
12-18 |
6334 |
|
54 |
AMAT, 0020-35549, MOUNT ROTATION ADJUST. ARM
|
12-18 |
6283 |
|
53 |
AMAT, 0020-35545, BAR, ROTATION ADJUST
|
12-18 |
6339 |
|
52 |
AMAT, 0020-27112, HOUSING SUSCEPTOR ROTATION LIFT MAGNET
|
12-18 |
6349 |
|
51 |
TEL, 1810-221048-13, QUARTZ SHIELD RING
|
11-17 |
6380 |
|
50 |
TEL, 1810-222191-11, QUARTZ FOCUS RING
|
11-17 |
6299 |
|
49 |
LAM, 715-011639-006, CAP, ELECTRODE, THIN EDGE, SEMI 6IN
|
11-16 |
6221 |
|
48 |
AMAT, 0040-35341, WELDMENT, BEARING COVER, RTP CH
|
10-31 |
6410 |
|
47 |
TEL, 1810-221471-25, CRYSTAL ELECTRODE 633-HOLE
|
10-18 |
6373 |
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