|
66 |
AMAT, 0020-36033, COUPLING MAGNETIC ROTATION
 |
12-18 |
5598 |
|
65 |
AMAT, 0020-36032, HOUSING ISOLATION MAG COUPLED ROTATION
|
12-18 |
5359 |
|
64 |
AMAT, 0020-36031, HOUSING MAGNETICALLY COUPLED ROTATION
|
12-18 |
5471 |
|
63 |
AMAT, 0020-36030, HOUSING UPPER WAFER LIFT
|
12-18 |
5584 |
|
62 |
AMAT, 0020-36029, SHAFT MAG COUPLED ROTATION
|
12-18 |
5597 |
|
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
|
12-18 |
5534 |
|
60 |
AMAT, 0020-36026, BRACKET LOCATING ROTATION ARM
|
12-18 |
5673 |
|
59 |
AMAT, 0020-36022, SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT
|
12-18 |
5661 |
|
58 |
AMAT, 0020-36019, BRACKET WAFER LIFT MAG COUPLED ROTATION
|
12-18 |
5733 |
|
57 |
AMAT, 0020-36018, BRACKET SUPPORT TO UPPER CYLINDER
|
12-18 |
5818 |
|
56 |
AMAT, 0020-36017, SUPPORT ROTATION HOUSING AND BEARING
|
12-18 |
5930 |
|
55 |
AMAT, 0020-36015, AIR DAM LOWER LAMP ASSY
|
12-18 |
5879 |
|
54 |
AMAT, 0020-35549, MOUNT ROTATION ADJUST. ARM
|
12-18 |
5823 |
|
53 |
AMAT, 0020-35545, BAR, ROTATION ADJUST
|
12-18 |
5893 |
|
52 |
AMAT, 0020-27112, HOUSING SUSCEPTOR ROTATION LIFT MAGNET
|
12-18 |
5848 |
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