|
75 |
AMAT, 0040-38491, COVER LEFT LOWER AIR SHROUD
 |
12-18 |
6286 |
|
74 |
AMAT, 0040-38490, COVER, UPPER AIR SHROUD
|
12-18 |
6240 |
|
73 |
AMAT, 0021-89703, RING, CLAMP DOME NECK
|
12-18 |
6352 |
|
72 |
AMAT, 0020-37051, RETAINER BEARING R3 ROT
|
12-18 |
6509 |
|
71 |
AMAT, 0020-37026, BASE SUSCEPTOR LIFT SHAFT
|
12-18 |
6390 |
|
70 |
AMAT, 0020-36817, HOUSING ROTATION. R3 MAG. COUPLED
|
12-18 |
6290 |
|
69 |
AMAT, 0020-36713, SPACER, BEARING ROT 3.2
|
12-18 |
6141 |
|
68 |
AMAT, 0020-36470, SPACER BEARING ASD 5200 ROTATION
|
12-18 |
6169 |
|
67 |
AMAT, 0020-36362, COVER BEARING R3 ROTATION
|
12-18 |
6019 |
|
66 |
AMAT, 0020-36033, COUPLING MAGNETIC ROTATION
|
12-18 |
5899 |
|
65 |
AMAT, 0020-36032, HOUSING ISOLATION MAG COUPLED ROTATION
|
12-18 |
5672 |
|
64 |
AMAT, 0020-36031, HOUSING MAGNETICALLY COUPLED ROTATION
|
12-18 |
5773 |
|
63 |
AMAT, 0020-36030, HOUSING UPPER WAFER LIFT
|
12-18 |
5881 |
|
62 |
AMAT, 0020-36029, SHAFT MAG COUPLED ROTATION
|
12-18 |
5879 |
|
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
|
12-18 |
5858 |
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