|
62 |
AMAT, 0020-36029, SHAFT MAG COUPLED ROTATION
 |
12-18 |
5474 |
|
61 |
AMAT, 0020-36028, FLAG OPTO SENSOR
|
12-18 |
5413 |
|
60 |
AMAT, 0020-36026, BRACKET LOCATING ROTATION ARM
|
12-18 |
5558 |
|
59 |
AMAT, 0020-36022, SHAFT TRAVEL ADJUSTMENT MAG COUPLED ROT
|
12-18 |
5549 |
|
58 |
AMAT, 0020-36019, BRACKET WAFER LIFT MAG COUPLED ROTATION
|
12-18 |
5622 |
|
57 |
AMAT, 0020-36018, BRACKET SUPPORT TO UPPER CYLINDER
|
12-18 |
5687 |
|
56 |
AMAT, 0020-36017, SUPPORT ROTATION HOUSING AND BEARING
|
12-18 |
5814 |
|
55 |
AMAT, 0020-36015, AIR DAM LOWER LAMP ASSY
|
12-18 |
5761 |
|
54 |
AMAT, 0020-35549, MOUNT ROTATION ADJUST. ARM
|
12-18 |
5691 |
|
53 |
AMAT, 0020-35545, BAR, ROTATION ADJUST
|
12-18 |
5772 |
|
52 |
AMAT, 0020-27112, HOUSING SUSCEPTOR ROTATION LIFT MAGNET
|
12-18 |
5728 |
|
51 |
TEL, 1810-221048-13, QUARTZ SHIELD RING
|
11-17 |
5793 |
|
50 |
TEL, 1810-222191-11, QUARTZ FOCUS RING
|
11-17 |
5701 |
|
49 |
LAM, 715-011639-006, CAP, ELECTRODE, THIN EDGE, SEMI 6IN
|
11-16 |
5646 |
|
48 |
AMAT, 0040-35341, WELDMENT, BEARING COVER, RTP CH
|
10-31 |
5799 |
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