|
81 |
LAM, 716-028454-012, QUARTZ DISK
 |
01-05 |
5893 |
|
80 |
MATTSON, 303-01408-00, SUPPORT CVD HEATER
|
12-25 |
5830 |
|
79 |
MATTSON, 303-01409-00, CLAMP
|
12-25 |
5803 |
|
78 |
MATTSON, 303-01407-00, SUPPORT STANDOFF
|
12-25 |
5796 |
|
77 |
AMAT, 0040-38493, COVER REAR LOWER AIR SHROUD
|
12-18 |
5779 |
|
76 |
AMAT, 0040-38492, COVER RIGHT LOWER AIR SHROUD
|
12-18 |
5845 |
|
75 |
AMAT, 0040-38491, COVER LEFT LOWER AIR SHROUD
|
12-18 |
5827 |
|
74 |
AMAT, 0040-38490, COVER, UPPER AIR SHROUD
|
12-18 |
5806 |
|
73 |
AMAT, 0021-89703, RING, CLAMP DOME NECK
|
12-18 |
5912 |
|
72 |
AMAT, 0020-37051, RETAINER BEARING R3 ROT
|
12-18 |
6050 |
|
71 |
AMAT, 0020-37026, BASE SUSCEPTOR LIFT SHAFT
|
12-18 |
5939 |
|
70 |
AMAT, 0020-36817, HOUSING ROTATION. R3 MAG. COUPLED
|
12-18 |
5833 |
|
69 |
AMAT, 0020-36713, SPACER, BEARING ROT 3.2
|
12-18 |
5770 |
|
68 |
AMAT, 0020-36470, SPACER BEARING ASD 5200 ROTATION
|
12-18 |
5869 |
|
67 |
AMAT, 0020-36362, COVER BEARING R3 ROTATION
|
12-18 |
5709 |
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