|
216 |
LAM, 716-042579-301, RING, CONF, TWIST TOP, OUTER, 300MM R
 |
01-14 |
5257 |
|
215 |
LAM, 716-042580-300, RING, CONF, INNER BYPASS, 300MM
|
01-14 |
5421 |
|
214 |
LAM, 716-013344-006, RING, COVER, OUTER, GND
|
01-14 |
5443 |
|
213 |
LAM, 716-030135-001, EDGE RING, 8 INCH, NOTCH
|
01-14 |
5534 |
|
212 |
AMAT, 0200-02396, LINER CERAMIC MIDDLE PRODUCER SE
|
01-14 |
5861 |
|
211 |
AMAT, 0200-02395, TOP, CERAMIC LINER, AMAT
|
01-14 |
5859 |
|
210 |
TEL, 1810-222191-11, QUARTZ FOCUS RING, TEL
|
01-12 |
5977 |
|
209 |
TEL, 1810-221048-13, QUARTZ SHIELD RING, TEL
|
01-12 |
6218 |
|
208 |
TEL, 2L10-255346-11, FOCUS RING, TEL
|
01-12 |
6186 |
|
207 |
AMAT, 0040-35049, CLAMP RING LOWER
|
01-12 |
6125 |
|
206 |
AMAT, 0040-06477, CLAMP RING UPPER RP
|
01-12 |
6277 |
|
205 |
AMAT, 0040-35140, CLAMP RING UPPER ATM
|
01-12 |
6427 |
|
204 |
AMAT, 0040-46460, BASE PLATE CHAMBER
|
01-08 |
6668 |
|
203 |
LAM, 839-019080-608, ESC, TUNABLE MZ 300MM, E-BAND TYPE, LAM
|
12-30 |
6920 |
|
202 |
AMAT, 0200-35019, INSERT INJECT 4 ZONE
|
12-28 |
6364 |
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