|
632 |
AMAT, 0040-31888, Left rear shield
 |
03-12 |
3013 |
|
631 |
AMAT, 0040-39291, Front shield
|
03-12 |
3182 |
|
630 |
AMAT, 0040-31890, Front cover shield
|
03-12 |
3247 |
|
629 |
AMAT, 0015-09417, Clamp lid fins
|
03-12 |
3392 |
|
628 |
AMAT, 0200-01284, SHADOW RING, STEPPED, QUARTZ, 300MM EMAX
|
10-13 |
3616 |
|
627 |
AMAT, 0200-01797, INSERT RING, NM, 300MM EMAX
|
10-13 |
3427 |
|
626 |
AMAT, 0200-01321, SHADOW RING, INSERT, 45 DEGREE, RA63, QU
|
10-13 |
3189 |
|
625 |
LAM, 715-031454-001, Side plate
|
10-06 |
3234 |
|
624 |
LAM, 715-028459-001, Lower Seal Plate
|
10-06 |
3139 |
|
623 |
LAM, 715-330834-001, HSG, LWR reaction chamber
|
10-06 |
2974 |
|
622 |
LAM, 16-435080-00, SHWRHD, 300MM, 15 INCH, TC, TAPERED
|
09-07 |
3049 |
|
621 |
VAT P/N, 65048-PH52-ADR1, CONTROL PENDULUM VALVE, VAT VALVE
|
09-07 |
2969 |
|
620 |
LAM, 853-052158-020, SI, ASSY, OUTER ELECTRODE, ABE TYPE, 12…
|
09-05 |
2974 |
|
619 |
LAM, 853-052157-010, SI, ASSY INNER ELECTRODE, ABE TYPE, 12 …
|
09-05 |
2835 |
|
618 |
TEL, 3D05-200094-12, SI, RING, SHIELD UPPER, 300MM
|
09-05 |
2884 |
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