|
630 |
AMAT, 0040-31890, Front cover shield
 |
03-12 |
2974 |
|
629 |
AMAT, 0015-09417, Clamp lid fins
|
03-12 |
3127 |
|
628 |
AMAT, 0200-01284, SHADOW RING, STEPPED, QUARTZ, 300MM EMAX
|
10-13 |
3318 |
|
627 |
AMAT, 0200-01797, INSERT RING, NM, 300MM EMAX
|
10-13 |
3140 |
|
626 |
AMAT, 0200-01321, SHADOW RING, INSERT, 45 DEGREE, RA63, QU
|
10-13 |
2914 |
|
625 |
LAM, 715-031454-001, Side plate
|
10-06 |
2943 |
|
624 |
LAM, 715-028459-001, Lower Seal Plate
|
10-06 |
2847 |
|
623 |
LAM, 715-330834-001, HSG, LWR reaction chamber
|
10-06 |
2697 |
|
622 |
LAM, 16-435080-00, SHWRHD, 300MM, 15 INCH, TC, TAPERED
|
09-07 |
2778 |
|
621 |
VAT P/N, 65048-PH52-ADR1, CONTROL PENDULUM VALVE, VAT VALVE
|
09-07 |
2697 |
|
620 |
LAM, 853-052158-020, SI, ASSY, OUTER ELECTRODE, ABE TYPE, 12…
|
09-05 |
2719 |
|
619 |
LAM, 853-052157-010, SI, ASSY INNER ELECTRODE, ABE TYPE, 12 …
|
09-05 |
2567 |
|
618 |
TEL, 3D05-200094-12, SI, RING, SHIELD UPPER, 300MM
|
09-05 |
2631 |
|
617 |
TEL, 3D05-300243-11, SI, COVER RING, 12 INCH
|
09-05 |
2600 |
|
616 |
TEL, 3D10-302020-11, SI, CATHODE, 12 INCH, SCCM
|
09-05 |
2620 |
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