|
636 |
AMAT, 0020-34173, Side cover
 |
03-12 |
2974 |
|
635 |
AMAT, 0040-31886, Right rear shield
|
03-12 |
3106 |
|
634 |
AMAT, 0040-31887, Right rear shield
|
03-12 |
3153 |
|
633 |
AMAT, 0040-31889, Left side shield
|
03-12 |
3156 |
|
632 |
AMAT, 0040-31888, Left rear shield
|
03-12 |
3161 |
|
631 |
AMAT, 0040-39291, Front shield
|
03-12 |
3315 |
|
630 |
AMAT, 0040-31890, Front cover shield
|
03-12 |
3443 |
|
629 |
AMAT, 0015-09417, Clamp lid fins
|
03-12 |
3524 |
|
628 |
AMAT, 0200-01284, SHADOW RING, STEPPED, QUARTZ, 300MM EMAX
|
10-13 |
3756 |
|
627 |
AMAT, 0200-01797, INSERT RING, NM, 300MM EMAX
|
10-13 |
3563 |
|
626 |
AMAT, 0200-01321, SHADOW RING, INSERT, 45 DEGREE, RA63, QU
|
10-13 |
3317 |
|
625 |
LAM, 715-031454-001, Side plate
|
10-06 |
3368 |
|
624 |
LAM, 715-028459-001, Lower Seal Plate
|
10-06 |
3284 |
|
623 |
LAM, 715-330834-001, HSG, LWR reaction chamber
|
10-06 |
3136 |
|
622 |
LAM, 16-435080-00, SHWRHD, 300MM, 15 INCH, TC, TAPERED
|
09-07 |
3188 |
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