|
647 |
LAM, 715-011001-002, HOUSING UPPER REACTION CHAMBER
 |
03-12 |
2447 |
|
646 |
AMAT, 0021-10223, Outer chamber liner
|
03-12 |
2430 |
|
645 |
AMAT, 0021-09718, Slit chamber liner
|
03-12 |
2607 |
|
644 |
AMAT, 0021-09104, Lower chamber liner
|
03-12 |
2652 |
|
643 |
AMAT, 0021-09097, Vespel lineer alignment
|
03-12 |
2570 |
|
642 |
AMAT, 0010-10327, ESC SHELL ASSY, 200MM, NOTCH
|
03-12 |
2683 |
|
641 |
AMAT, 0190-23513, BRG, 9 INCH HYBRID CERAMIC
|
03-12 |
2588 |
|
640 |
AMAT, 0022-05877, DISK SHUTTER, BESC, CENTER PIN, RPG CHBR 3…
|
03-12 |
2757 |
|
639 |
AMAT, 0040-02937, WATER MINIFOLD, TXZ CIP 200&300MM
|
03-12 |
2653 |
|
638 |
AMAT, 0195-07994, ESC, DPS METAL
|
03-12 |
2796 |
|
637 |
AMAT, 0010-03244, TxZ Heater 200mm
|
03-12 |
2886 |
|
636 |
AMAT, 0020-34173, Side cover
|
03-12 |
2830 |
|
635 |
AMAT, 0040-31886, Right rear shield
|
03-12 |
2958 |
|
634 |
AMAT, 0040-31887, Right rear shield
|
03-12 |
3020 |
|
633 |
AMAT, 0040-31889, Left side shield
|
03-12 |
3017 |
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