|
641 |
AMAT, 0020-36015, AIR DAM LOWER LAMP ASSY
 |
12-18 |
5061 |
|
640 |
AMAT, 0020-35809, SUPPORTER
|
07-11 |
5059 |
|
639 |
LAM, 716-028454-012, QUARTZ DISK
|
01-05 |
5057 |
|
638 |
AMAT, 0021-89703, RING, CLAMP DOME NECK
|
12-18 |
5052 |
|
637 |
AMAT, 0020-35545, BAR, ROTATION ADJUST
|
12-18 |
5051 |
|
636 |
MATTSON, 304-05259-00, FILLER OUTBOARD
|
06-08 |
5050 |
|
635 |
TEL, 1810-222191-11, QUARTZ FOCUS RING, TEL
|
01-12 |
5050 |
|
634 |
AMAT, 0190-10301, KAWASAKI ROBOT, AMAT
|
05-19 |
5048 |
|
633 |
TEL, 1810-222191-11, QUARTZ FOCUS RING
|
11-17 |
5046 |
|
632 |
AMAT, 0020-36470, SPACER BEARING ASD 5200 ROTATION
|
12-18 |
5033 |
|
631 |
LAM, 16-253739-00, GAS RING, 300MM
|
07-29 |
5032 |
|
630 |
AMAT, 0190-35049, BASE H2O COOLED PYROMETER
|
07-11 |
5022 |
|
629 |
AMAT, 0020-27112, HOUSING SUSCEPTOR ROTATION LIFT MAGNET
|
12-18 |
5020 |
|
628 |
AMAT, 0040-38492, COVER RIGHT LOWER AIR SHROUD
|
12-18 |
5016 |
|
627 |
MATTSON, 303-01408-00, SUPPORT CVD HEATER
|
12-25 |
5015 |
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