|
831 |
AMAT, 0200-19113, PIN, WAFER LIFT, 300MM, ROUND HEAD
 |
01-17 |
8 |
|
830 |
AMAT, 0200-36642, PIN, WAFER LIFT, 200MM
|
01-17 |
6 |
|
829 |
AMAT, 0200-03201, PIN, WAFER LIFT, 300MM, EPI
|
01-17 |
8 |
|
828 |
AMAT, 0200-16767, LIFT PIN
|
01-17 |
4 |
|
827 |
AMAT, 0010-59796, 300MM PRODUCER CERAMIC HEATER
 |
10-10 |
508 |
|
826 |
AMAT, 0010-59788, 300mm Producer Ceramic Heater(APF)
|
10-10 |
438 |
|
825 |
AMAT, 0021-27883, COVER SLIT
|
04-03 |
1204 |
|
824 |
LAM, 839-044692-002, Liner housing
|
04-03 |
1012 |
|
823 |
LAM, 715-104664-001, Baffle
|
04-03 |
887 |
|
822 |
LAM, 715-088776-004, Lower Electrode Plate
|
04-03 |
651 |
|
821 |
LAM, 715-066095-203, Upper electrode return
|
04-03 |
665 |
|
820 |
LAM, 715-066095-202, Lower electrode return
|
04-03 |
621 |
|
819 |
LAM, 715-044691-004, Liner spacer
|
04-03 |
667 |
|
818 |
LAM, 715-044691-002, Lower liner
|
04-03 |
730 |
|
817 |
LAM, 715-042721-866, Chamber Liner
|
04-03 |
598 |
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